Overview of Active Vibration Isolation Platform

STACIS ® III is a flexible active vibration isolation system. The STACIS active isolation platform system adopts advanced inertial vibration sensors, advanced control algorithms, and piezoelectric actuators to continuously measure ground activity, and then expand and contract the piezoelectric actuators to filter ground motion and eliminate vibration in real time.

STAIS * * was initially designed to isolate precision micro lithography, metrology, and detection equipment in advanced semiconductor factories, and has now become an industry standard solution for sensitive instruments in noisy environments, including but not limited to semiconductor factories, failure analysis laboratories, nanotechnology research, nanomanufacturing facilities, and material research centers.

The STACIS III active isolation platform system includes a brand new and improved digital controller DC-2020. This new * * control system features a new dual core processor, Ethernet, and USB serial ports on the front and rear panels, providing users with a modern and easy-to-use graphical user interface (GUI). STACIS has hundreds of successful installation cases worldwide and is an ideal isolation system suitable for instruments that are sensitive to vibration.

Advantages of the active isolation platform system STACIS III

STACIS is hundreds of times harder than air isolators and has no limitations of any air isolation system. It does not have a "soft" suspension, unlike active air systems, the STACIS can be placed under tools with internal active air isolation systems, allowing both systems to operate in a * * state.

The unique serial design and proprietary high force piezoelectric technology can achieve a wide active bandwidth of 0.6 Hz * * * 150 Hz and active isolation performance of 90% vibration reduction starting from 2 Hz.

Characteristics of active isolation platform system STACIS III

▪ ** Newly improved DC-2020 digital controller with easy-to-use graphical user interface

▪ Isolation starts at 0.6 Hz and reaches an isolation rate of 40% * * * 70% at 1Hz

▪ When the frequency is 2 Hz and higher, the vertical and horizontal isolation rates are greater than 90%

▪ Reduce infrastructure requirements and construction costs, allowing equipment to operate normally even in the presence of significant external vibrations

▪ Effective isolation range, 0.6Hz to 150Hz

▪ Widely recognized and affirmed by numerous users

▪ 6-way degree of freedom hard installation design, no need for air suspension

▪ Powerful control system does not require regular recalibration

▪ Point of use design solution, seamlessly compatible with the customer's existing vibration isolation system

▪ As the external environment changes, the system automatically adjusts to adapt to different external vibration situations

▪ TMC's STACIS ® Active vibration reduction using piezoelectric actuators in technology

▪ Digital controllers and PC based graphical user interfaces (GUI)

▪ Improve customer product output, quality, and yield.

▪ ROHS compliant

▪ ** Wide active isolation bandwidth, * * low-frequency isolation effect

▪ Active vibration cancellation at sub hertz, mainly in the frequency range of 0.6-6Hz for isolation

▪ Stackable design

▪ Active hard installation structure instead of soft suspension, no low-frequency drift, active components connected to rigid springs

▪ The passive spring filters out the load resonance from the STACIS sensor, requiring very little tuning and even no tuning needed

▪ Due to impedance mismatch, compatible with internal isolators of the instrument

▪ The load can reach 2000kg

▪ Active vibration isolation system on the market

Performance of Active Vibration Isolation Platform

Use simulated vibration of VC-C (500 μ in/s, 12.5 μ m/s RMS) to test 4500 pounds (2045 kilograms) payload

Specification of Active Vibration Isolation Platform

Performance specifications

STACIS users and application areas

1. Microelectronics and Semiconductors

▪ Chip testing

▪ microphotolithographic technique

▪ Mask calibration

2. Scientific research, nanotechnology

▪ SEM、TEM

▪ STEM、SPM

3. Laser table

▪ Life sciences, drug development

4. Industrial applications

▪ precision machining

Why choose an active vibration isolation system?

▪ Starting from<1Hz, strong ground vibrations are eliminated, and pneumatic platforms cannot effectively isolate vibrations at this low frequency

▪ Improve quality and production volume

▪ Smaller and more distinctive imaging capabilities

▪ frontier research

▪ More stable than pneumatic platforms

▪ * * Solution to Install Parameters at SEM Standard Locations

▪ Make the engineering cost of new laboratories and research equipment lower

Why choose STACIS for active vibration isolation system

▪ It resonates with the voice of researchers and provides the most earthquake free environment possible.

▪ A powerful low-frequency isolation system on the market.

▪ At present, all SEM manufacturers have announced installation parameter requirements, and the required vibration parameters need to be met by an active vibration isolation system.

▪ STAIS * * was invented in the 1990s and further developed by TMC to develop and install thousands of active isolation systems, providing a reliable solution in the field of active isolation control.

Compared to pneumatic isolators, STACIS has several hundred times greater rigidity

The stable time, as a response to disturbances, is greatly shortened due to its unique series design, making it ideal for applications in mechanical manufacturing, dynamic loads, and independent rigid tabletops that require installation of lasers or light sources.

The following advantages are all * * in the industry

▪ The active isolation bandwidth of STACIS is 0.6Hz -150Hz

▪ Active vibration cancellation with 6 degrees of freedom, with a vibration interval of 8-10dB at 1Hz

▪ At 2-3Hz, the isolation can reach 90% (20dB)

Professional environmental investigation

1. Environmental investigation before and after installation, including vibration, magnetic field, and sound waves

2. After installation, environmental system certification can be provided

▪ Comprehensive environmental investigation services

▪ Issue a professional environmental report

▪ Provide vibration, magnetic field, sound wave detection and solutions

▪ TMC recommends practical solutions to users based on its extensive experience

▪ Over 40 years of industry experience, with expertise in the field**

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